Miniature vacuum chamber for electrical characterization of air-sensitive nanodevices

Introduction Nanomaterial devices are extremely sensitive to environmental factors, making controlled atmosphere measurements crucial. However, commercial vacuum probe stations are often too costly and bulky, limiting their use, especially in glovebox setups for air-sensitive materials. Methods We designed a compact, low-cost vacuum chamber with electrical feedthroughs for characterizing air-sensitive nanodevices. Built from standard vacuum components and a custom test board, the system enables three-terminal transport measurements under illumination and fits inside a glovebox for safe sample handling. Results and Conclusions We demonstrated the functionality of our low-cost vacuum chamber system by performing electrical transport measurements on a black phosphorus field-effect device prepared in an inert atmosphere. In the miniature vacuum chamber, the device performance was maintained over 15 days. The system enables reliable characterization of air-sensitive nanodevices under controlled conditions, providing an affordable and practical alternative to commercial setups.